Technical Data
Product Name
Chemical Structure
Absorbance Wavelength
Features
Applications
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TR-PAG-20304
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Appearance: off-white solid
Purity: ≥99.50%
Single metal ion: ≤10ppb
Acid value: ≤0.001mol/Kg
KrF photoresist
TR-PAG-30204
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Appearance: off-white solid
Purity: ≥99.50%
Single metal ion: ≤10ppb
Acid value: ≤0.001mol/Kg
KrF photoresist
TR-PAG-40507
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Appearance: off-white solid
Purity: ≥99.50%
Single metal ion: ≤200ppb
Acid value: ≤0.002mol/Kg
i-line photoresist
TR-PAG-42203
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Appearance: light yellow solid
Purity: ≥99.50%
Single metal ion: ≤200ppb
Acid value: ≤0.002mol/Kg
i-line photoresist
TR-TM1302
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Appearance: light yellow to colorless liquid
Purity: ≥99.00%
Monomer of KrF photoresist polymer
TR-B601
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MW: 8000-15000 PDI: <1.8
Moisture: <0.5%
Residual monomer: <1.0%
Single metal ion: <50ppb
Composition: HS=60-70%, ST=10-25%
TBA=5-20%
KrF photoresist polymer PHS resin
TR-B602
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MW: 15000±1000
PDI: 1.50-1.80
Residual monomer: <1.0%
Single metal ion: <50ppb
BOC: 30±5%
KrF photoresist polymer PHS resin